CVD System

2-Zone Chemical Vapor Deposition (CVD)

The 2-Zone CVD Furnace is a high-performance thermal processing system designed for precise deposition of thin films using chemical vapor deposition techniques. With independently controlled heating zones, it enables accurate temperature profiling for advanced material synthesis, nanotechnology applications, and semiconductor processing

2-Zone Chemical Vapor Deposition (CVD) 2-Zone Chemical Vapor Deposition (CVD) 2-Zone Chemical Vapor Deposition (CVD)

Features

  • Dual-zone independent temperature control
  • High temperature uniformity and stability
  • Programmable temperature profiles (multi-step ramp/soak)
  • Quartz tube reactor for clean processing
  • Compatible with inert and reactive gases
  • Compact and robust design
  • Digital PID temperature controllers
  • Safety interlocks and over-temperature protection










Technical Specification Of Chemical Vapour Deposition System (Cvd ) Model: Cvd-2z

Parameter Required Specification
Furnace Type Dual heating zone tube furnace system suitable for CVD applications
Number of Zones 2 Independent Zones
Heated Length Each heating zones is customised as per user requirements from 100mm -300mm heated length
Temperature Uniformity ±5°C or better within uniform hot zone
Quartz Reaction Tube Different Sizes of Quartz Tubes are provided as per user requirements from like 55mm ID x 60mm OD x 1000mm -1200mm Length, 75mm ID x 80mm OD x 1000mm -1200mm Length, 95mm ID x 100mm OD x 1000mm -1200mm Length ( Optional High Purity Alumina Tube )
Maximum Temperature 1200°C / 1400°C (optional)
Continuous Operating Temperature 1100°C (minimum 24 hrs – 48 Hours)
Heating Rate Up to 10°C/min up to 800°C and ≥6°C/min from 800–1100°C
Heating Elements Kanthal / SiC / MoSi₂ (optional), Open Type
Furnace Construction Dual body construction using powder coated CRC sheet
Installation System to be mounted on table with caster wheels including integrated control panel and gas panel
Insulation Layers Minimum 3 Insulation layers provided
Hot Face Temperature Rating ≥1400°C


Temperature Measurement & Control

Parameter Required Specification
Thermocouples 2 No. K type / S Type thermocouples in Inconel protection tube and 1 or 2 spares Provided
Temperature Controllers PID Digital Controller with Ramp /SOAK Programming provided for both heating zones Independently.
Power Control Thyristor-based power controller
Over-Temperature Protection Independent over-temperature controllers for both zones Independently.


Gas Delivery System

Parameter Required Specification
Mass Flow Controllers Minimum 3 MFCs (approx. 1000 SCCM each)
Gas Compatibility Compatible with non-corrosive gases (Ar, N₂, O₂, H₂, CH₄, CO, CO₂ etc.)
Communication Analog / RS-485 communication
Automation Manual Control or PLC-based control with HMI display for gas flow, temperature profile and vacuum provided as per user requirement or Tender Specifications or as per scope of supply.
Gas Manifold SS316 gas manifold and fittings
Gas Line Length Approx. 10 m from cylinder bank to furnace provided or as per user request.
Internal Gas Piping Electro-polished SS316
Safety Valves Needle valves, NRVs and over-pressure safety valve provided


Vacuum Provision

Parameter Required Specification
Rotary Vacuum Pump Capable of achieving ≤10⁻³ mbar. High Vacuum System ( Optional )
Vacuum Hose Stainless steel bellows with suitable flange
Vacuum Valve Isolation valve suitable for 5×10⁻³ mbar
Vacuum Gauge Measurement up to 10⁻³ mbar by Pirani gauge with LCD display
Pressure Control Throttling valve for chamber pressure control


Flange Assembly

Parameter Required Specification
Flanges Stainless Steel Double-walled water-cooled flanges
Sealing Viton O-ring sealing Set Up for leak-tight operation
Ports Provision for vacuum port (KF type) and gas purging Swage Type
Thermocouple Port Provision for in-situ sample temperature measurement at two points provided


Electrical & Utility Requirements

Parameter Required Specification
Power Supply Dedicated control panel required
Electrical Rating 400–440 V, 50/60 Hz, 3-phase, 4-wire
Gas Cylinders Provision for 3 to 4 gas cylinders with SS304 double stage regulators is provided or customised as per User Requirement.
Cooling Water 2–3 kgf/cm² pressure through ½” tubing
System Footprint Approx. 2.5 m (W) × 1.5 m (H) × 0.8 m (D)


Chiller System

Parameter Required Specification
Water Chiller SAI Make Water Chiller provided with System or as per the Brands mentioned by user / Tender.
Cooling Capacity 1 TR Cooling Capacity
Working Temperature 5–10°C
Mobility Caster Wheel-mounted design provided as a standard or can be provided as per user requirement.


Safety Features

Parameter Required Specification
Temperature Safety Automatic digital temperature cut-off provided by default
Water Safety Low water level protection provided by default
Electrical Safety Over-current protection provided by default
Pressure Safety Over-pressure protection provided by default


Documentation, Training & Warranty

Parameter Required Specification
Training On-site training provided to user group for 1-2 Days or as per user requirement.
Documentation Operation & service manuals provided with Machine
Warranty 1 year comprehensive warranty is provide as a Standard. But the Warranty is provided for 3 years or 5 Years as per User Requirements


Mandatory Spares Supplied With System

Parameter Required Specification
Sample placement rod (SS) 1 No. SS 304 Sample Placement rod for Sample Loading into Furnace
Viton O-rings 2 sets (8 Nos.) of Viton O Rings provided for Quartz Tube Vacuum Sealing
Quartz Tube 1 No. spare Quartz Tube provided as a Standard. It is recommended for User to buy more tubes being a fragile / Consumable item.

Applications

  • Thin film deposition (CVD processes)
  • Graphene growth
  • Carbon nanotube synthesis
  • Semiconductor processing
  • Nanomaterial research
  • Oxidation and annealing processes
  • Ceramic material development
© 2014 Scientific & Analytical Instruments Designed by Goya